Tan Wee Meng
Summary
Aspiring to thrive in the equipment and process field. Experienced in working on Etch, PVD and Epi tools Preventive Maintenance (PM) and Corrective Maintenance (CM). Established effective troubleshooting of equipment and process related problem to minimize equipment down time based on tools daily Statistical Equipment Control (SEC) as well as Statistical Process Control (SPC) charts review. Planned and implemented effective tool Preventive Maintenance (PM) program to minimize machine breakdown as based on wafer count. Adopted 5S housekeeping mindset to improve working environment and safety. Effective team player and believes in delivering company goals in a timely basis. Good communicator and strives for collaborative partnerships.
Overview
25
25
years of professional experience
Work History
Associate Test Engineer
KLA Corporation
06.2022 - Current
- Involve in the integration of Altair inspection optical system to the handler to form the final inspection tool
- Perform final testing of inspection tool
- Involve in the fabrication of Surface product laser modules
Diffusion Equipment Engineer
Vanguard International Semiconductor
09.2021 - 05.2022
- In charge Kokusai 200mm Polysilicon diffusion tools
- Managed spare parts to ensure sufficient stock level to support both equipment Preventive Maintenance (PM) and Corrective Maintenance (CM) through closely monitoring and updating the spare parts quantity list upon withdrawal
- Raised purchase requisition once the spare parts quantity runs low
- Ensure that the quartz ware process kits after chamber wet clean (PM) sent out to external vendor for cleaning delivered on time before the next PM
Senior MOCVD Equipment Engineer
IGSS Gan Pte Ltd
11.2020 - 08.2021
- In charge of new site relocation, site planning with external collaborator, Professional Engineer and Contractors
- Worked closely with civil professional engineer to review the baking furnace and auxiliary equipment weights as the cleanroom raise floors and Sub-Fab grounds may not be able to withstand the heavy loads
- Through structure loadings calculation and constant review, the floor plans to overcome the problems
- Performed susceptor furnace tool as well as auxiliary equipments (chiller, water pumps and tank) move-in and hooked up with movers and contractors
- Performed furnace installation (Vac-long, VSG-B200) via phone call or email technical advice with the Furnace OEM
- Performed MOCVD susceptors (4", 6" and 8") baking process qualification
- Worked together with Epi Engineering team to develop Best Known Method (BKM) for the susceptor cleaning
- This is to ensure that the coating deposited on the susceptors are well removed before baking to eliminate haze on the wafers
- Performed daily check on the susceptor furnace heater assembly and graphite couplings
- Performed bi-monthly check on the vacuum system gate valves and nozzles
- In charge of the cleanroom process gases and MO source procurement, stock movement and installation of H2 pallets, O2 cylinders, NH3 cylinders, TMAl and TMGa MO sources
- Manage both cleanroom consumable items (like cleanroom gloves, hairnets, shoes cover) as well as equipment spare parts to ensure sufficient stock level to support both equipment Preventive Maintenance (PM) and Corrective Maintenance (CM) through closely monitoring and updating the spare parts quantity list upon withdrawal
- Will raise PO once the consumable items and tool spare parts quantity run low
- Work with Epi engineering in the qualification and fine tuning of the processes for production on the AMEC Prismo D-Blue MOCVD tool
- Maintain good housekeeping in the cleanroom
Service Engineer
CoreTech Integrated Pte Ltd
01.2020 - 10.2020
- To perform new surface analysis X-ray Photoelectron Spectroscopy (XPS) tools installation in customers' sites
- To perform Preventive Maintenance and Corrective Maintenance on XPS tools
Senior Equipment Engineer
GlobalFoundries Woodlands
03.2018 - 04.2019
- To establish effective troubleshooting of equipment and process related problem to minimize equipment down time based on tools daily Statistical Equipment Control chart review (as based on production wafers with lot ID run) and Statistical Process Control chart review (as based on set up wafers run) on the 5 AMAT Centura Reduced Pressure Epitaxy tools and 10 Vector Scrubbers as well as 10 Guardian Burn Box in charge
- Managed spare parts to ensure sufficient stock level to support both equipment Preventive Maintenance (PM) and Corrective Maintenance (CM) through closely monitoring and updating the spare parts quantity list upon withdrawal
- Raised purchase requisition once the spare parts quantity runs low
- Ensure that the quartz ware process kits after chamber wet clean (PM) sent out to external vendor for cleaning delivered on time before the next PM
- Planned and implemented effective Epitaxy tool Preventive Maintenance (PM) program to minimize machine breakdown as based on mini-wet clean wafer count(10000 ± 2000 wafers: replacement of upper quartz dome, susceptor, pre-heat ring, lifter pins, upper liner and lower liner) and full-wet clean wafer count(30000± 2000 wafers: replacement of upper quartz dome, susceptor, pre-heat ring, lifter pins, upper liner, lower liner, upper and lower domes lamps, lower quartz dome and pressure control valve
- Worked together with my 5 Equipment Assistant Engineers to perform tools PM and performed 5S housekeeping
- Planned and implemented effective Preventive Maintenance (PM) program on Vector 3000 scrubbers as well as Guardian GS8 burn box clogging by introducing quarterly PM to remove the choked by products from scrubber inlets and the burn box manifold outlet
- Performed inspection on the GS8 top hat graphite gasket for crack
- Worked together with my 5 Equipment Assistant Engineers to perform Scrubber/Burn Box PM
- In charge of new AMAT Epitaxy process tool (C5200 with motorized lifter and Vita software feature installed) and auxiliary tools (such as Ebara dry pumps: ESA200WN and AA20), MAT Scrubber, Cleaning Bench purchase from Capex fund
Research Engineer
Institute of Microelectronics
09.2011 - 03.2018
- Took ownership of the 200mm Anelva Ultra High Vacuum (SRE2100), AMAT Centura Reduced Pressure (RP) Epitaxy(C5200), Mattson (AST3000) and WaferMaster Annealing tools ownership
- Developed R&D photonic epitaxy process recipes with scientists and Technology Development Engineers
- In charge of tool spare parts management and procurement
- Ensured that the epitaxy and annealing chambers PM were performed on time based on wafer counts and coordinated with the vendors for respective tools PM activities (performed PM together with vendors)
- Prepared Epitaxy and RTA tools PM check sheets, process and hardware troubleshooting guide as well as On Job Training tasks for new engineers
- Involved in the AMAT Reduced Pressure Epitaxy (C5200), Veeco TurboDisc K465i MOCVD tools, GST Dragon burn-wet scrubber and dry pumps hooked up as well as process qualification with the module scientist, engineer and vendors
Assistant Equipment Engineer
Statschippac Singapore Pte Ltd
09.2010 - 05.2011
- Performed preventive maintenance and corrective maintenance of PVD Thin Film (Nexx Nimbus and Endura), Descumb (PSK and Cheetan)/ Dry Plasma Etcher (Cheetan) equipments and also Temperature Ovens (Blue M)
- Assisted Equipment Engineer on the equipment spare parts inventory check
Assistant Maintenance Engineer
ST Microelectronics Pte Ltd
09.2007 - 09.2010
- Performed preventive maintenance and troubleshooting of Dry/Wet Etch/Descumb Equipments, Heat Exchangers/Chillers, Temperature Ovens and Scrubbers (such as RIE Tegal 6500, Lam 490/590, PSC-101 Semitool, Neslab Chillers, RISE Wet Benches, Fusion 200, Mazalii Oven and TecHarmonic Scrubber)
- Involved in equipment continual improvement project (such as modification of RIE Dry Etch Tegal 6500 Rinser O-ring for better sealing during rinsing process and Wet Bench EKC Pumps Seals to achieve stable flow rate during operation)
- Took ownership of daily 5S Fab housekeeping and equipments spare parts inventory control
Service Engineer
CentiForce Instruments Pte Ltd
11.2004 - 09.2007
Associate Engineer
Chartered Ammunition Industries Pte Ltd
07.2001 - 11.2004
Engineering Assistant
Perkin Elmer Singapore Pte Ltd
11.1999 - 06.2001
Education
Bachelor's Degree - electrical & Electronics
University of Sunderland
Singapore01.2011
Diploma - Electrical Engineering
Singapore Polytechnic
Singapore01.1997
Skills
- Front End Wafer Fabrication Process
- Etch
- PVD
- Epi Equipment
- PM
- CM
- Vendors management
- Spare parts management
- Procurement of new tools
- Oracle
- SAP
- FMEA
- 8D
- Microsoft Office
- Strategic Planning
- Resourceful
- Responsible
- Multi-Tasking
- Leadership
- Effective Communication
- Team Player
- Observant
- Awareness
Personal Development
- WSG sponsored Robotic Program, 06/01/19 - 11/30/19
- People Development Course, 04/01/23
Equipment Training
Votsch Temperature and Climatic Chambers Service Training, CentiForce Instruments Singapore Pte Ltd
Personal Information
Nationality: Singaporean
Coursework
- Emergency Response Team Course, Sakra Emergency Response Brigade
- FMEA and 8D Problem Solving Training, GlobalFoundries Woodlands
Timeline
Associate Test Engineer
KLA Corporation
06.2022 - Current
Diffusion Equipment Engineer
Vanguard International Semiconductor
09.2021 - 05.2022
Senior MOCVD Equipment Engineer
IGSS Gan Pte Ltd
11.2020 - 08.2021
Service Engineer
CoreTech Integrated Pte Ltd
01.2020 - 10.2020
Senior Equipment Engineer
GlobalFoundries Woodlands
03.2018 - 04.2019
Research Engineer
Institute of Microelectronics
09.2011 - 03.2018
Assistant Equipment Engineer
Statschippac Singapore Pte Ltd
09.2010 - 05.2011
Assistant Maintenance Engineer
ST Microelectronics Pte Ltd
09.2007 - 09.2010
Service Engineer
CentiForce Instruments Pte Ltd
11.2004 - 09.2007
Associate Engineer
Chartered Ammunition Industries Pte Ltd
07.2001 - 11.2004
Engineering Assistant
Perkin Elmer Singapore Pte Ltd
11.1999 - 06.2001
Bachelor's Degree - electrical & Electronics
University of Sunderland
Diploma - Electrical Engineering
Singapore Polytechnic
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