Soo Chen Lim
Singapore
Summary
Process Section Manager at Fab7/F7H lithography, leading a team of 30 engineers (mix of engineer, senior engineer, principle engineer and MTS).
Skilled in new process and tool qualification, new technology development, new product introduction, as well as new FAB startup and ramp-up under tight timeline, quality, yield requirements.
My forte is process, defectivity, yield, cost, productivity, material quality CIP through BKM benchmarking and sustainable solutions implementations.
Possess good communication and collaborative skills working within teams and cross functional teams to achieve set targets.
Key Competencies:
• New Production Introduction
• United Module Development
• New Technology Development
• Process Engineering Continual Improvement
• New FAB startup process & tool qualification
• Drive customer quality improvements/projects/initiatives
• Cross Site Collaboration and BKM Benchmarking
• Material Quality/Cost/Inventory Management & Roadmap
Overview
25
25
years of professional experience
1
1
Certification
Work History
Senior Section Manager (Lithography)
GlobalFoundries
06.2020 - Current
Years in GlobalFoundries (Fab7) – 19 yrs
Total Experience in Semiconductor – 23 yrs
Key Responsibilities:
• New Production Introduction
• United Module Development
• New Technology Development
• Process Engineering Continual Improvement
• New FAB startup process & tool qualification
• Drive customer quality improvements/projects/initiatives
• Cross Site Collaboration and BKM Benchmarking
• Material Quality/Cost/Inventory Management & Roadmap
Career Highlights:
Yr 2023
• Lead team to qualify 2 major photochemical suppliers in new FAB.
• Lead team to qualify 8 new tools within 2 months to support new FAB ramp-up.
• Resolve Polyimide process inherent weakness to achieve highest watermark moves to meet 10% surge in capacity in Dec'23.
Yr 2022
• Role expansion to take on KRF/Iline/Polyimide tools and process team (with total headcount of 30 process engineer and 50 tools).
• Tasked to lead litho process/tool qualification activities for new FAB startup with no delay or quality impact.
Yr 2021
• Role expansion to take on New Technology Group (NTG) / New Product Introduction (NPI) / United Module Development (UMD team) (with headcount of 20 process engineer).
• Turned team from RED to Green within 1 year via new technology issues resolution to enable ramp-up.
• Introduced Auto recipe creation concept and successfully launched recipe automation for scanner and overlay recipe. Man-hour reduction from 4hr to 1hr per device.
Member of Technical Staff (Lithography)
GlobalFoundries
01.2015 - 06.2020
Key Responsibilities:
• Photochemical Quality/Cost/Inventory Management.
• Recipe management and BKM Benchmarking and Best Practice implementation.
• Team leader to 5 engineers.
Career Highlights:
• Enabled Immersion FEOL RRC process after solvent EBR7030 Metallics/LPC improvement (cost saving 2mil per year).
• Mapped out critical photochemical quality improvement roadmap to reduce inline quality excursions.
• Cross Fab collaboration on BKM Benchmarking:- Achieved 70% critical defect reduction in Topcoatless photoresist with best practice implementation.
• 100% supplier PCN qualification success with no delay or quality impact (1. Advance filtration 2. Materials go-green conversion 3. Alternate plant. 4. Mixing tank/Packaging material change etc.).
• Lead taskforce (litho/facilities/FA lab/SQE) to work on solvent EBR7030 facilities ionic exchanger installation, qualification and full release.
Principle Engineer (Lithography)
GlobalFoundries
01.2008 - 01.2015
Key Responsibilities:
• Track Application & Defectivity Reduction Driver
• Layer Engineering
Senior Engineer (Lithography)
GlobalFoundries
04.2004 - 01.2008
Key Responsibilities:
• FAB7 Litho technology transfer and startup team
Engineer (Lithography)
Systems on Silicon Manufacturing Company Pte Ltd (SSMC)
07.1999 - 04.2004
Key Responsibilities:
• Litho technology transfer and startup team
Education
Bachelor's Degree (Honours) - Mechanical And Production Engineering
Nanyang Technological University
Singapore07.1999
Skills
New Production Introduction
New Technology Development
Process Engineering Continual Improvement
New FAB startup
BKM Benchmarking
Defectivity Control
Yield Improvement
Cost Reduction
Supplier Quality Management
Team Management
KPI Tracking
Problem Solving
Certification
- Lithius Track Operations and Equipment PM training, Tokyo Electron US - Jan 2005
- ISO 9001:2000 Interal Auditor Training with Specific Reference to ISO/TS 16969:2002, Omnex Systems - Jan 2003
- Statistical Process Control, Philips - Jan 2003
- Workshop on "Effective Process Mapping for ISO 9001:2000 Standard", PSB Academy - Jan 2003
- APQP, FMEA and Control Plans, Omnex Inc - Jan 2002
- Introduction to Microlithography, SPIE, the international society for optics and photonics - Jan 2000
Awards
- Spotlight Award for Process Inherent Weakness Resolution
Issued by GLOBALFOUNDRIES · Dec 2023
Resolved polyimide process inherent weakness which allows new process units addition to achieve highest watermark moves to overcome the additional 10% surge on capacity in Dec'23 to fulfill shipment and fabout requirement.
- Appreciation Award for Cost Reduction
Issued by GLOBALFOUNDRIES · Sep 2022
Cost Award - KrF Photochemical Volume Reduction (savings $120K/year).
- Women’s Recognition Award
Issued by GLOBALFOUNDRIES · Mar 2021
Honoring women who have made significant contributions to our GF mission and who are role models for our company values: Create, Embrace, Partner, and Deliver.
- Appreciation Award for Cost Reduction
Issued by GLOBALFOUNDRIES · Jul 2020
Cost Award - SHINETSU photochemical go green qualification, 2 into 1 viscosity consolidation and volume reduction.
- Appreciation Award for Cost Reduction
Issued by GLOBALFOUDRIES · Apr 2020
Cost Award - Dupont photochemical go green conversion and volume reduction.
- CEO Award
Issued by GLOBALFOUNDRIES · Sep 2019
CEO Award - Crushing Suppliers' Cost of non-Quality.
- Spotlight Award for Cost Reduction
Issued by GLOBALFOUNDRIES · Sep 2019
Cost Award - Enabled Immersion FEOL RRC process after solvent EBR7030 Metallics/LPC improvement (saving 2mil/year).
- Spotlight Award for Cost Reduction
Issued by GLOBALFOUNDRIES · Jan 2014
High production usage photoresist volume reduction from 3.5cc to below 1.0cc for multiple photoresist, cost saving of ~ 1500K per annum.
- Appreciation Award for Cost Reduction
Issued by GLOBALFOUNDRIES · Jan 2013
High production usage photoresist volume reduction from 1.5cc to below 1.0cc for multiple photoresist, cost saving of ~ 600K per annum.
- Appreciation Award for Yield Improvement
Issued by GLOBALFOUNDRIES · Jan 2012
Successful installation of 0.18um Al BEOL process in 300mm FAB, in less than 2 months, get >80% yield and the ET parameters are >80% matched.
- Appreciation Award for Defect Reduction
Issued by GLOBALFOUNDRIES · Jan 2009
Edge-Bead-Removal solvent splash-back defect reduction from >10 counts to
- Appreciation Award for Defect Reduction
Issued by GLOBALFOUNDRIES · Jan 2008
Double puddle developer recipe optimization and implementation for KrF contact / via processes to reduce missing contact / via holes.
- Appreciation Award for Defect Reduction
Issued by GLOBALFOUNDRIES · Jan 2007
Reduced (>2k total defect counts to
- Appreciation Award for Cost Reduction
Issued by GLOBALFOUNDRIES
Cost Award - SHINETSU photochemical go green qualification, 2 into 1 viscosity consolidation and volume reduction.
Timeline
Senior Section Manager (Lithography)
GlobalFoundries
06.2020 - Current
Member of Technical Staff (Lithography)
GlobalFoundries
01.2015 - 06.2020
Principle Engineer (Lithography)
GlobalFoundries
01.2008 - 01.2015
Senior Engineer (Lithography)
GlobalFoundries
04.2004 - 01.2008
Engineer (Lithography)
Systems on Silicon Manufacturing Company Pte Ltd (SSMC)
07.1999 - 04.2004
Bachelor's Degree (Honours) - Mechanical And Production Engineering
Nanyang Technological University
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