Chu Shi Ting
Singapore
Summary
With over 8 years of experience in wafer fabrication, specializing in semiconductor equipment automation and process optimization. Extensive knowledge of SECS/GEM communication standards for real-time equipment integration and automation. Proven expertise in Fault Detection and Classification (FDC) for process monitoring, troubleshooting, and optimization. Strong background in equipment maintenance, process development, and improvement ensuring high-quality results within tight deadlines. Excels at managing complex projects from conception to completion, consistently delivering exceptional outcomes.
Overview
8
8
years of professional experience
Work History
Sr. Semiconductor Application Engineer
INFICON
08.2022 - Current
- Deploy and set up Fault Detection and Classification (FDC)/SPC Reports for customers
- Integrate tool to FabGuard FDC system or HOST via SEM/GEM communication and non-SEC/GEM tools
- Provide technical assistance within areas of specialty such as yield issue, new product development, etc
- Via FDC system
- Provide written and oral feedback to the customer on applications work including process troubleshooting, recipe development, and advanced analysis techniques
- Provide written and oral feedback to onsite Program Manager on weekly activities, customer requests, needs, and requirements
- Provide installation support (Software and Hardware) of INFICON equipment as needed and conduct DOE for new sensors installed
- Provide onsite training on INFICON products including software, hardware usage, and basic troubleshooting such as RGA (Residual Gas Analyzer), Endpoint detector, etc
- Implemented FDC for customers resulting in a 92% decrease in the time spent monitoring equipment parameters from lot to lot
Equipment Engineer
Qualcomm
01.2022 - 07.2022
- Specialized in Evatec Clusterline 200E and 200CLN for Dielectric Deposition
- Collaborated with process engineers to drive continuous improvement (CI) programs to enhance equipment utilization, yield, and overall equipment effectiveness
- Established preventive maintenance programs and troubleshooting guides
- Optimized equipment utilization by continuously refining corrective and preventive maintenance (CM/PM) methods
- Trained, mentored, and certified equipment technicians in systematic troubleshooting and preventive maintenance skills
- Led new equipment startup, from facilities hookup to vendor acceptance
- Managed spare part inventory to ensure maintenance efficiency and supported cost reduction plans
- Investigated equipment faults and led continuous equipment improvement projects (CIP) to enhance process robustness
- Optimized maintenance schedules, resulting in an 8% decrease in total maintenance costs
Equipment Engineer
United Microelectronics Corporation
06.2018 - 12.2021
- Specialized in Applied Materials Endura/Centura CVD and PVD
- Ensured equipment uptime, productivity, and continuous improvement projects (CIP)
- Monitored tools via SPC skills, performed repairs and troubleshooting, and reviewed SOPs
- Led PM planning, equipment maintenance, and parts management
- Collaborated with process engineers to resolve line issues and enhance machine performance
- Successfully delivered multiple projects within tight deadlines
- Collaborated with process engineers to optimize deposition recipes, significantly reducing precursor consumption and achieving cost savings without compromising quality
- Maintained an 88% equipment uptime rate through proactive maintenance scheduling, predictive maintenance strategies, and rapid response protocols
Project Engineer
CSK Controls
08.2017 - 05.2018
- Provided solutions for semiconductor companies such as Micron, Infineon, and UMC, including SCADA configuration and relevant hardware installation services
- Deployed and integrated sensors for sub-fab equipment (Chiller, Scrubber) into SCADA systems for customers
Education
Bachelor of Engineering (Hons) - Electronics (Computer)
Universiti Malaysia Sarawak
Malaysia01-2017
Skills
- SEMI Equipment Communication Standard (SECS/GEM)
- Fault Detection and Classification (FDC) systems
- Expertise in operating and maintaining PVD, CVD, and Dry Etching equipment
- Semiconductor process development, optimization, thin film deposition, FDC systems, and hardware sensors (eg Residual Gas Analyzers)
- Strong leadership, project management, and communication skills, with a proven track record of guiding teams and managing stakeholder relationships
- Proficient in industry tools platforms, including AMAT, TEL, LAM, AMAT E3, and INFICON
- Certified in Software Engineering and Wonderware Application Server
Languages
English
Mandarin
Bahasa Malaysia
Softwares Tools Certifications
AMAT Centura/Producers/Endura, TEL Unity 2/Track8, LAM Novellus, Sumitomo Implant, SSEC, NIKON tools, SECS/GEM Interface Development, AMAT E3 (FDC Software), INFICON FabGuard (FDC Software), INFICON FabTime, OPC/Kepware, Software Engineering Immersive Course, 2022, Wonderware Application Server 2014 R2, 2017
Timeline
Sr. Semiconductor Application Engineer
INFICON
08.2022 - Current
Equipment Engineer
Qualcomm
01.2022 - 07.2022
Equipment Engineer
United Microelectronics Corporation
06.2018 - 12.2021
Project Engineer
CSK Controls
08.2017 - 05.2018
Bachelor of Engineering (Hons) - Electronics (Computer)
Universiti Malaysia Sarawak