ALEX LE

• Fabricate and improve semiconductor Bridge (SCB) initiator, MEMS applications
• Design and optimize Photolithography masks by Klayout software
• Experience with Photolithography, Dry Etch, Wet Etch, Diffusion, Metrology, Wire Bonding

• Responsible for CMP process research, design experiments and develop recipes to meet specifications
• Optimize baseline process to improve product's performance. Investigate and dispose the process abnormity, root cause identified and fixed
• Drive improvement on reliability, yield, process capability, process through-put, cost effectiveness
• Familiar with AFM, Optical spectroscopy, JMP, SQL, SPC, MES system

CMP Project related:

• Develop new algorithm for new process development
• Develop new CMP recipe for improving topography
  
• Qualification new slurries, new tools for cost saving and improving topo

Integration Project related:

• Improve bottom wordline with hybrid plug structure: creating new structure before OPOP loop to improve CD bottom.
• Joined in setup and integrate Super Cell 3D-NAND new process flow.
• Worked on new structure on Common Source improved contact of CMOS and Cell.
• Worked on new structure at Select Gate Drain for improving connection of BEOL and Cell.

• Define recipe for neutralization of flue gas and sea water in wasted water. Improve wet scrubber system by different mixing methods. Physical and Chemical model based to simulate for the Exhaust Gas Systems.

• Familiar with AutoCAD, Solidworks, Aspen, Ansys Fluent